The AI Infrastructure Stack
Sub-category 14.3

E-Beam Lithography & Mask Writing

Used for photomask writing and some specialty patterning. Quiet but high-margin.

Players

Players: NuFlare Technology 6256.T, IMS Nanofabrication INTC (Intel-owned), JEOL 6951.T, ASML (HMI/HF) ASML

Analysis coming soon — this page is scaffolding for deeper research into e-beam lithography & mask writing.