Fab Sub-Systems & Components

Suppliers to the suppliers — mass flow controllers, pumps, RF generators, gas panels. The unsung public-market workhorses.

Players

Players: MKS Instruments MKSI, Ichor Holdings ICHR, Ultra Clean Holdings UCTT, Brooks Automation (semicon, PE-owned post-split) Private, Advanced Energy AEIS, Edwards Vacuum / Atlas Copco ATCO-A.ST, Horiba 6856.T, Entegris ENTG